The SERVOPRO analyzers utilize an extensive portfolio of our non-depleting gas sensing technologies – including Paramagnetic, Zirconia, Flame Ionization Detection, Plasma, and Gas Chromatograph for a diverse range of applications.
These flexible analyzers either meet specific measurement requirements, such as for syngas, hydrocarbons, or trace gas mixtures, or provide multi-gas monitoring capabilities for applications such as continuous emissions monitoring systems or air separation unit plants.
Setting the standard for analysis in the industrial gas (IG) and semiconductor markets, the SERVOPRO range leads the field in measurement sensitivity
The flexible SERVOPRO range is designed to suit an extensive variety of measurements in IG and semiconductor applications. To this end, it uses an array of sensing technologies, including non-contact, non-depleting methods, covering a generous selection of gases and measurement ranges, to meet the needs of multiple safe area applications.
Whether you’re monitoring impurities in air separation unit gases, or ensuring the highest level of purity in semiconductor gases, the SERVOPRO range is up to the task, delivering the measurement sensitivity and performance required – from percentage-level readings to the lowest levels of trace detection available to the market.
Designed for simple operation, the SERVOPRO range is available for benchtop use or can be mounted in a 19” rack. All the analyzers feature extensive functionality, can be operated directly via intuitive onboard software, or remotely using a variety of analog and digital communications options, ensuring effective operation now and in the future.
Find your safe area gas analyzer solution here
DF-750 ULTRA提供行业先进的痕量/超痕量水分测量，针对300mm半导体工厂中使用的超高纯（UHP）气体的质量监控进行了优化。
紧凑型DF-760E ULTRA专为UHP大宗气体中行业领先的质量控制测量而设计，是针对痕量和超痕量水分和氧气的独特双重分析解决方案。
通过使用成熟的超痕量传感技术，NanoChrome ULTRA征服了半导体行业最严格的要求，与竞争技术相比，提供了一种经济高效的解决方案。
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