SERVOPRO DF-500 series

Ensure a more productive process with the latest in ultra-trace oxygen analysis

Empower your ultra-high-purity (UHP) gas with Gen-7 of our SERVOPRO DF-500 series of Coulometric analyzers for ultra-trace oxygen measurements.

Boasting a new, all-digital design and solid-state storage, this next-generation solution offers even higher reliability, with industry-leading lower detection limits and accurate results that enhance the operations of UHP gas producers around the world.

Gen-7 analyzers are built around Servomex’s trusted digital sensing technologies for proven reliability, ease of operation, and minimal maintenance.

Coulometric

Measure O₂ down to 45ppt with Coulometric sensing

Delivering an industry-leading measurement of oxygen, our highly sensitive, non-depleting Coulometric sensor does not need periodic replacement.

Raise the bar for your oxygen impurity detection

The Gen-7 upgrade of our Coulometric oxygen analyzer series makes it easier than ever before to boost productivity and efficiency in your semiconductor and electronic-grade gas processes.

Easy to use and maintain

The redesigned Gen-7 range of DF-500 series analyzers is user-friendly and easy to operate. It has a simplified digital design that’s easier to maintain and improves field serviceability. Combined with non-depleting sensor technology and extended calibration intervals, our Gen-7 analyzers offer a low lifetime cost of ownership with minimal ongoing maintenance requirements.

No-compromise performance

The Gen7 upgrade brings next-generation reliability to the DF-500 range, ensuring it can meet the most demanding standards of the global semiconductor and electronics gas industries. Offering industry-leading Lower Detection Limits and reliable, accurate oxygen measurements, these analyzers combine easy-to-use performance with a relatively low cost of ownership, empowering end-users with advanced, cost-effective solutions for their UHP gas applications.

computer

All-digital reliability

The Gen-7 range of DF-500 series analyzers is enhanced by an all-digital design with long-life solid-state drive for increased reliability. Ready to face future challenges for years to come, it delivers the same industry-leading ultra-trace measurements for oxygen that are trusted by UHP gas producers globally.

Discover the Gen-7 DF-500 series product range

High-stability O₂ measurements optimized for UHP gas applications

Joseph Ha
Joseph Ha
Product Manager, Purity & Specialty

Delivering premium performance in a range of background gases, the compact, reliable, and highly accurate DF-550E provides ultra-trace oxygen measurements of oxygen (O2) as a contaminant in ultra-high purity electronic gases.

It uses non-depleting Coulometric sensor technology to make exceptional low trace and ultra-trace ppt O2 measurements, with a highly sensitive 200 parts-per-trillion Lower Detection Limit.

With minimal sensor drifting, the DF-550E is ideal for upset-prone conditions.

Ultra-trace oxygen measurements delivered at the lowest levels

Joseph Ha
Joseph Ha
Product Manager, Purity & Specialty

The DF-560E ULTRA is designed to measure ultra-trace oxygen to the very lowest levels, providing the semiconductor industry with an industry-leading 45 parts-per-trillion (ppt) Lower Detection Limit.

It will automatically change units as it monitors your sample gas down to ppt levels.

Non-depleting, factory-calibrated Coulometric technology, supports cost-effective setup and configuration, helping to reduce operational costs.


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